Li, Y., Worsey, E., Bleiker, S. J., Edinger, P., Kulsreshath, M. K., Tang, Q., Takabayashi, A. Y., Quack, N., Verheyen, P., Bogaerts, W., Gylfason, K. B., Pamunuwa, D. & Niklaus, F.
Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process.
Li, Y., Bleiker, S. J., Edinger, P., Worsey, E., Kumar Kulsreshath, A., Tang, Q., Yuji Takabayashi, A., Quack, N., Verheyen, P., Bogaerts, W., Gylfason, K. B., Pamunuwa, D. & Niklaus, F.
Design and Fabrication of a 4-Terminal In-Plane Nanoelectromechanical Relay.
in IEEE Transducers 2023 Conference on Solid-State Sensors, Actuators and Microsystems (2023). Archive: DIVA
Jo, G., Edinger, P., Bleiker, S. J., Wang, X., Yuji Takabayashi, A., Sattari, H., Quack, N., Jezzini, M., Su Lee, J., Kumar Malik, A., Verheyen, P., Zand, I., Khan, U., Bogaerts, W., Stemme, G., Gylfason, K. B. & Niklaus, F.
Wafer-level Hermetic Sealing of Silicon Photonic MEMS by Direct Metal-to-Metal Bonding.
in WaferBond’22 Conference of Wafer Bonding for Microsystems, 3D- and Wafer Level Integration (2022). Archive: DIVA
Jo, G., Edinger, P., Bleiker, S. J., Wang, X., Takabayashi, A. Y., Sattari, H., Quack, N., Jezzini, M., Lee, J. S., Verheyen, P., Zand, I., Khan, U., Bogaerts, W., Stemme, G., Gylfason, K. B. & Niklaus, F.
Jo, G., Edinger, P., Bleiker, S., Wang, X., Takabayashi, A. Y., Sattari, H., Quack, N., Jezzini de Anda, M. A., Verheyen, P., Stemme, G., Bogaerts, W., Gylfason, K. B. & Niklaus, F.
Wafer-level vacuum sealing for packaging of silicon photonic MEMS.
in Silicon Photonics XVI (eds. Reed, G. T. & Knights, A. P.) 11 (SPIE, 2021). doi: 10.1117/12.2582975. Archive: DIVA
IEEE Transducers 2023 on Solid-State Sensors, Actuators and Microsystems, 25-29 June 2023, Kyoto, Japan - invited talk by Dinesh Pamunuwa (UNIVBRIS) on the nanomechanical technology for electronics developed in the ZeroAMP and i-EDGE projects.
ZeroAMP produces annual publishable reports which describe the project achievements. They are public and the latest one can be downloaded by clicking on the link below.
A video presentation of the ZeroAMP project has been produced by SCIPROM at the beginning of the project. A very special thanks to ZeroAMP coordinator Piers Tramlett for a beautiful voiceover.
Project Flyer
Our flyer is a concise presentation of our overall project structure and goals. It is printer-friendly and can be easily read on a mobile device.