The ZeroAMP 5th Consortium Meeting took place on 10-11 November 2021 as a hybrid meeting, online and at XFAB (Erfurt, Germany). It was a pleasure to meet each other after almost 2 years of full online meetings. In addition to the fruitful scientific discussion about the project progress and challenges, it was nice to visit the cleanroom at XFAB and discover the historic center of Erfurt!