%0 Conference Paper
%T Wafer-level vacuum sealing for packaging of silicon photonic MEMS
%C Online Only, United States
%I SPIE
%P 11
%W http://kth.diva-portal.org/smash/record.jsf?pid=diva2%3A1542824&dswid=-9605
%@ 978-1-5106-4217-1 978-1-5106-4218-8
%U https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11691/2582975/Wafer-level-vacuum-sealing-for-packaging-of-silicon-photonic-MEMS/10.1117/12.2582975.full
%B Silicon Photonics XVI
%A Jo, Gaehun
%A Edinger, Pierre
%A Bleiker, Simon
%A Wang, Xiaojing
%A Takabayashi, Alain Y.
%A Sattari, Hamed
%A Quack, Niels
%A Jezzini de Anda, Moises A.
%A Verheyen, Peter
%A Stemme, Göran
%A Bogaerts, Wim
%A Gylfason, Kristinn B.
%A Niklaus, Frank
%E Reed, Graham T.
%E Knights, Andrew P.
%D 2021-3-5