%0 Conference Paper
%T Design and Fabrication of a 4-Terminal In-Plane Nanoelectromechanical Relay
%W https://www.diva-portal.org/smash/record.jsf?dswid=-1530&pid=diva2%3A1810149&c=6&searchType=SIMPLE&language=en&query=yingying+li&af=%5B%22contentTypeCode%3Arefereed%22%5D&aq=%5B%5B%5D%5D&aq2=%5B%5B%5D%5D&aqe=%5B%5D&noOfRows=50&sortOrder=author_sort_asc&sortOrder2=title_sort_asc&onlyFullText=false&sf=all
%@ 979-8-3503-3302-2
%B IEEE Transducers 2023 Conference on Solid-State Sensors, Actuators and Microsystems
%A Li, Yingying
%A Bleiker, Simon J.
%A Edinger, Pierre
%A Worsey, Elliott
%A Kumar Kulsreshath, Alain
%A Tang, Qi
%A Yuji Takabayashi, Alain
%A Quack, Niels
%A Verheyen, Peter
%A Bogaerts, Wim
%A Gylfason, Kristinn B.
%A Pamunuwa, Dinesh
%A Niklaus, Frank
%D 2023-06-29