@inproceedings{li_design_2023,
	title = {Design and {Fabrication} of a 4-{Terminal} {In}-{Plane} {Nanoelectromechanical} {Relay}},
	booktitle = {{IEEE} {Transducers} 2023 {Conference} on {Solid}-{State} {Sensors}, {Actuators} and {Microsystems}},
	author = {Li, Yingying and Bleiker, Simon J. and Edinger, Pierre and Worsey, Elliott and Kumar Kulsreshath, Alain and Tang, Qi and Yuji Takabayashi, Alain and Quack, Niels and Verheyen, Peter and Bogaerts, Wim and Gylfason, Kristinn B. and Pamunuwa, Dinesh and Niklaus, Frank},
	month = jun,
	year = {2023},
}