%0 Journal Article
%T Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process
%P 10.1039.D3NR03429A
%W https://www.diva-portal.org/smash/record.jsf?dswid=-1530&pid=diva2%3A1810174&c=4&searchType=SIMPLE&language=en&query=yingying+li&af=%5B%22contentTypeCode%3Arefereed%22%5D&aq=%5B%5B%5D%5D&aq2=%5B%5B%5D%5D&aqe=%5B%5D&noOfRows=50&sortOrder=author_sort_asc&sortOrder2=title_sort_asc&onlyFullText=false&sf=all
%U http://xlink.rsc.org/?DOI=D3NR03429A
%X Silicon 4-T NEM relays, patterned in front-end-of-line processing and monolithically integrated with back-end-of-line metallic interconnects manufactured in a commercial foundry platform.
          , 
            Integrated nanoelectromechanical (NEM) relays can be used instead of transistors to implement ultra-low power logic circuits, due to their abrupt turn off characteristics and zero off-state leakage. Further, realizing circuits with 4-terminal (4-T) NEM relays enables significant reduction in circuit device count compared to conventional transistor circuits. For practical 4-T NEM circuits, however, the relays need to be miniaturized and integrated with high-density back-end-of-line (BEOL) interconnects, which is challenging and has not been realized to date. Here, we present electrostatically actuated silicon 4-T NEM relays that are integrated with multi-layer BEOL metal interconnects, implemented using a commercial silicon-on-insulator (SOI) foundry process. We demonstrate 4-T switching and the use of body-biasing to reduce pull-in voltage of a relay with a 300 nm airgap, from 15.8 V to 7.8 V, consistent with predictions of the finite-element model. Our 4-T NEM relay technology enables new possibilities for realizing NEM-based circuits for applications demanding harsh environment computation and zero standby power, in industries such as automotive, Internet-of-Things, and aerospace.
%G en
%J Nanoscale
%A Li, Yingying
%A Worsey, Elliott
%A Bleiker, Simon J.
%A Edinger, Pierre
%A Kulsreshath, Mukesh Kumar
%A Tang, Qi
%A Takabayashi, Alain Yuji
%A Quack, Niels
%A Verheyen, Peter
%A Bogaerts, Wim
%A Gylfason, Kristinn B.
%A Pamunuwa, Dinesh
%A Niklaus, Frank
%D 2023-10-12