@article{li_integrated_2023,
	title = {Integrated 4-terminal single-contact nanoelectromechanical relays implemented in a silicon-on-insulator foundry process},
	issn = {2040-3364, 2040-3372},
	url = {http://xlink.rsc.org/?DOI=D3NR03429A},
	doi = {10.1039/D3NR03429A},
	abstract = {Silicon 4-T {NEM} relays, patterned in front-end-of-line processing and monolithically integrated with back-end-of-line metallic interconnects manufactured in a commercial foundry platform.
          , 
            Integrated nanoelectromechanical ({NEM}) relays can be used instead of transistors to implement ultra-low power logic circuits, due to their abrupt turn off characteristics and zero off-state leakage. Further, realizing circuits with 4-terminal (4-T) {NEM} relays enables significant reduction in circuit device count compared to conventional transistor circuits. For practical 4-T {NEM} circuits, however, the relays need to be miniaturized and integrated with high-density back-end-of-line ({BEOL}) interconnects, which is challenging and has not been realized to date. Here, we present electrostatically actuated silicon 4-T {NEM} relays that are integrated with multi-layer {BEOL} metal interconnects, implemented using a commercial silicon-on-insulator ({SOI}) foundry process. We demonstrate 4-T switching and the use of body-biasing to reduce pull-in voltage of a relay with a 300 nm airgap, from 15.8 V to 7.8 V, consistent with predictions of the finite-element model. Our 4-T {NEM} relay technology enables new possibilities for realizing {NEM}-based circuits for applications demanding harsh environment computation and zero standby power, in industries such as automotive, Internet-of-Things, and aerospace.},
	pages = {10.1039.D3NR03429A},
	journaltitle = {Nanoscale},
	shortjournal = {Nanoscale},
	author = {Li, Yingying and Worsey, Elliott and Bleiker, Simon J. and Edinger, Pierre and Kulsreshath, Mukesh Kumar and Tang, Qi and Takabayashi, Alain Yuji and Quack, Niels and Verheyen, Peter and Bogaerts, Wim and Gylfason, Kristinn B. and Pamunuwa, Dinesh and Niklaus, Frank},
	urldate = {2023-10-23},
	date = {2023-10-12},
	langid = {english},
}