@inproceedings{worsey_fully_2023, address = {Munich, Germany}, title = {Fully {Microelectromechanical} {Non}-{Volatile} {Memory} {Cell}}, isbn = {978-1-66549-308-6}, url = {https://ieeexplore.ieee.org/document/10052290/}, doi = {10.1109/MEMS49605.2023.10052290}, urldate = {2023-04-04}, booktitle = {2023 {IEEE} 36th {International} {Conference} on {Micro} {Electro} {Mechanical} {Systems} ({MEMS})}, publisher = {IEEE}, author = {Worsey, Elliott and Kulsreshath, Mukesh K. and Tang, Qi and Pamunuwa, Dinesh}, month = jan, year = {2023}, pages = {507--510}, }